EFFECT OF GROWTH TEMPERATURE ON SUPERCONDUCTING PHASES OF AS-GROWN BISRCACUO THIN-FILM FORMED BY RF MAGNETRON SPUTTERING

被引：7

作者：

KURODA, K ^{[1
]}

KOJIMA, K ^{[1
]}

YOKOYAMA, K ^{[1
]}

HAMANAKA, K ^{[1
]}

机构：

[1] MITSUBISHI ELECTR CO, MAT & ELECTR DEVICES LAB, AMAGASAKI, HYOGO 661, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 11期

关键词：

BiSrCaCuO; Crystal structure; Sputtering; Superconducting phase; Superconductor; Thin films; XRD;

D O I：

10.1143/JJAP.29.L2033

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of growth temperature on superconducting phases has been studied for BiSrCaCuO thin films grown on MgO(100) infstrates at temperatures in the range 500–660°C by RF magnetron sputtering from three targets. The chemical compositions of the metal elements of the films formed at each infstrate temperature were adjusted to Bi:(Sr+Ca):Cu=2:3:2, 2:3.5:2.5 and 2:4:3. Low-Tcphases (232 phases), 232/243 phases and high-Tcphases (243 phases) were obtained above 580°C with the 2:3:2 composition, above 590°C with the 2:3.5:2.5 composition, and above 620°C with the 2:4:3 composition. © 1990 IOP Publishing Ltd.

引用

页码：L2033 / L2036

页数：4

共 13 条

[1] LOW-TEMPERATURE GROWTH OF HIGH-TC BI-SR-CA-CU-O FILMS BY MAGNETRON SPUTTERING [J].

ASANO, H ;

ASAHI, M ;

KATOH, Y ;

MICHIKAMI, O .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08) :L1487-L1488

[2] INSITU EPITAXIAL-GROWTH OF BI2(SR,CA)3CU2OX FILMS BY ION-BEAM SPUTTERING WITH AN ATOMIC OXYGEN SOURCE [J].

FUJITA, J ;

YOSHITAKE, T ;

IGARASHI, H ;

SATOH, T .

APPLIED PHYSICS LETTERS, 1990, 56 (03) :295-297

[3] NEW TECHNIQUE FOR PREPARATION OF BISRCACUO THIN-FILMS WITH TC OF 100-K AND ABOVE [J].

FUKUTOMI, M ;

MACHIDA, J ;

TANAKA, Y ;

ASANO, T ;

YAMAMOTO, T ;

MAEDA, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08) :L1484-L1486

[4] SINGLE TARGET SPUTTERING OF AS-GROWN SUPERCONDUCTING BI(-PB)-SR-CA-CU-O THIN-FILMS ON MGO(100) [J].

HAKURAKU, Y ;

MIYAGI, D ;

HIGO, S ;

OGUSHI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (06) :L926-L929

[5] SUPERSTRUCTURE IN THIN-FILMS OF BI-BASED COMPOUNDS ON MGO [J].

KOJIMA, K ;

SCHLOM, DG ;

KURODA, K ;

TANIOKU, M ;

HAMANAKA, K ;

ECKSTEIN, JN ;

HARRIS, JS .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (09) :L1638-L1641

[6] SUPERCONDUCTIVITY OF BI SYSTEM THIN-FILMS FORMED BY CONSECUTIVELY SPUTTERING 3 PB-DOPED TARGETS OF SLIGHTLY DIFFERENT COMPOSITIONS [J].

KURODA, K ;

KOJIMA, K ;

TANIOKU, M ;

YOKOYAMA, K ;

HAMANAKA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (02) :L291-L293

[7] SURFACE-MORPHOLOGY AND CRYSTAL-STRUCTURES OF AS-GROWN BISRCACUO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FROM 3 TARGETS [J].

KURODA, K ;

KOJIMA, K ;

TANIOKU, M ;

YOKOYAMA, K ;

HAMANAKA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (09) :1586-1592

[8] FORMATION OF AS-GROWN BISRCACUO THIN-FILMS BY SPUTTERING 3 TARGETS HEAVILY DOPED WITH PB IN ATMOSPHERES OF O-2 AND N2O/O2 MIXTURES [J].

KURODA, K ;

KOJIMA, K ;

TANIOKU, M ;

YOKOYAMA, K ;

KUROKI, H ;

HAMANAKA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (06) :1066-1069

[9] STRUCTURE AND SUPERCONDUCTING PROPERTIES OF BI-SR-CA-CU-O THIN-FILMS ANNEALED AT LOW-TEMPERATURES [J].

MATSUSHIMA, T ;

HIROCHI, K ;

ADACHI, H ;

SETSUNE, K ;

WASA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1989, 28 (01) :L97-L99

[10] LOW-TEMPERATURE ANNEALING EFFECT OF AS-GROWN BI-SR-CA-CU-O THIN-FILMS ON SUPERCONDUCTING PROPERTY AND THE C-AXIS LATTICE-CONSTANT [J].

MIURA, S ;

YOSHITAKE, T ;

MANAKO, T ;

MIYASAKA, Y ;

SHOHATA, N ;

SATOH, T .

APPLIED PHYSICS LETTERS, 1989, 55 (13) :1360-1362

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