INDIUM ARSENIDE QUANTUM WIRES FABRICATED BY ELECTRON-BEAM LITHOGRAPHY AND WET-CHEMICAL ETCHING

被引:21
作者
YOH, K
KIYOMI, K
NISHIDA, A
INOUE, M
机构
[1] Department of Electrical Engineering, Osaka Institute of Technology, Osaka, 535
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 12B期
关键词
QUANTUM WIRE; ELECTRON BEAM LITHOGRAPHY; COULOMB BLOCKADE; CURRENT QUANTIZATION; INAS; MBE;
D O I
10.1143/JJAP.31.4515
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the fabrication of deeply etched quantum wires on an InAs/AlGaSb heterostructure by utilizing electron beam lithography and wet-chemical etching. In order to avoid the inherent gate leakage current in heterostructures based on antimonides, deeply etched wire structures have been investigated. In two terminal devices of approximately 1000 angstrom wide quantum wires, quantized drain current through drain-induced-barrier-lowering has been observed at 77 K. Coulomb regulated SET characteristics were also observed at 77 K reflecting the small parasitic capacitance between terminals. Coulomb staircase characteristics and 1-D quantized current were seen to overlap in some devices. Various combinations of device parameter conditions have been discussed. Material, structural and temperature effects on the prospective device performances have been also discussed.
引用
收藏
页码:4515 / 4519
页数:5
相关论文
共 19 条
[1]   CHARACTERIZATION OF VERY NARROW QUASI-ONE-DIMENSIONAL QUANTUM CHANNELS [J].
BERGGREN, KF ;
ROOS, G ;
VANHOUTEN, H .
PHYSICAL REVIEW B, 1988, 37 (17) :10118-10124
[2]   MAGNETIC DEPOPULATION OF 1D SUBBANDS IN A NARROW 2D ELECTRON-GAS IN A GAAS-ALGAAS HETEROJUNCTION [J].
BERGGREN, KF ;
THORNTON, TJ ;
NEWSON, DJ ;
PEPPER, M .
PHYSICAL REVIEW LETTERS, 1986, 57 (14) :1769-1772
[3]   FLUCTUATIONS IN SUBMICROMETER SEMICONDUCTING DEVICES CAUSED BY THE RANDOM POSITIONS OF DOPANTS [J].
DAVIES, JH ;
NIXON, JA .
PHYSICAL REVIEW B, 1989, 39 (05) :3423-3426
[4]  
Eugster C. C., 1990, International Electron Devices Meeting 1990. Technical Digest (Cat. No.90CH2865-4), P335, DOI 10.1109/IEDM.1990.237162
[5]   TUNNELING SPECTROSCOPY OF AN ELECTRON WAVE-GUIDE [J].
EUGSTER, CC ;
DELALAMO, JA .
PHYSICAL REVIEW LETTERS, 1991, 67 (25) :3586-3589
[6]   QUANTIZED CURRENT IN A QUANTUM-DOT TURNSTILE USING OSCILLATING TUNNEL BARRIERS [J].
KOUWENHOVEN, LP ;
JOHNSON, AT ;
VANDERVAART, NC ;
HARMANS, CJPM ;
FOXON, CT .
PHYSICAL REVIEW LETTERS, 1991, 67 (12) :1626-1629
[7]   SINGLE-ELECTRON TRANSISTORS - ELECTROSTATIC ANALOGS OF THE DC SQUIDS [J].
LIKHAREV, KK .
IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (02) :1142-1145
[8]   MOBILITY MODULATION IN A QUASI-ONE-DIMENSIONAL SI-MOSFET WITH A DUAL-GATE STRUCTURE [J].
MATSUOKA, H ;
ICHIGUCHI, T ;
YOSHIMURA, T ;
TAKEDA, E .
IEEE ELECTRON DEVICE LETTERS, 1992, 13 (01) :20-22
[9]   SINGLE-ELECTRON CHARGING AND PERIODIC CONDUCTANCE RESONANCES IN GAAS NANOSTRUCTURES [J].
MEIRAV, U ;
KASTNER, MA ;
WIND, SJ .
PHYSICAL REVIEW LETTERS, 1990, 65 (06) :771-774
[10]   IV CHARACTERISTICS OF COUPLED ULTRASMALL-CAPACITANCE NORMAL TUNNEL-JUNCTIONS [J].
MULLEN, K ;
BENJACOB, E ;
JAKLEVIC, RC ;
SCHUSS, Z .
PHYSICAL REVIEW B, 1988, 37 (01) :98-105