MASS-SPECTROMETRIC OBSERVATION OF DECOMPOSITION PRODUCTS SFX (X=1, 2) IN SF6 DISCHARGE AT 13.56 MHZ

被引：6

作者：

NAGASEKI, K ^{[1
]}

ISHIKAWA, I ^{[1
]}

NISHIMURA, E ^{[1
]}

SAITO, Y ^{[1
]}

SUGANOMATA, S ^{[1
]}

机构：

[1] TOKYO ELECTRON LTD,NIRASAKI 40701,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 02期

关键词：

SF6; GAS; MASS SPECTROMETRY; 13.56 MHZ DISCHARGE; FRAGMENTATION; SF(X) SPECIES;

D O I：

10.1143/JJAP.32.967

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The presence of a smaller mass fragment SF2 was indicated from the output signal of a quadrupole mass spectrometer by means of direct sampling from an SF6 discharge space at a pressure of 50 or 100 mTorr. Its intensity was observed to increase with the discharge power according to the degree of fragmentation of SF6.

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页码：967 / 968

页数：2

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