SIMULATION OF CRITICAL IC FABRICATION PROCESSES USING ADVANCED PHYSICAL AND NUMERICAL-METHODS

被引：112

作者：

JUNGLING, W

PICHLER, P

SELBERHERR, S

GUERRERO, E

POTZL, HW

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1985年 / 32卷 / 02期

关键词：

D O I：

10.1109/T-ED.1985.21925

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：156 / 167

页数：12

共 13 条

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