DOPING EFFECTS ON CONDUCTIVITY AND ELECTRON-SPIN RESONANCE IN POST-HYDROGENATED POLYCRYSTALLINE SILICON

被引：10

作者：

HASEGAWA, S

KISHI, K

KURATA, Y

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 02期

关键词：

D O I：

10.1063/1.333060

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：542 / 546

页数：5

共 19 条

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