ELECTRICAL-PROPERTIES OF AL2O3-TA2O5 COMPOSITE DIELECTRIC THIN-FILMS PREPARED BY RF REACTIVE SPUTTERING

被引：21

作者：

NOMURA, K

OGAWA, H

ABE, A

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 04期

关键词：

D O I：

10.1149/1.2100596

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：922 / 925

页数：4

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