SERIAL COSPUTTERING OF MIXED AL/ZR AND AL2O3/ZRO2 FILMS

被引：6

作者：

BELKIND, A ^{[1
]}

LAIRD, R ^{[1
]}

ORBAN, Z ^{[1
]}

RAFALKO, PW ^{[1
]}

机构：

[1] AIRCO COATING TECHNOL,CONCORD,CA 94524

来源：

THIN SOLID FILMS | 1992年 / 219卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90722-N

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Serial cosputtering is based on sequential sputtering of one material from a first magnetron onto the back of a second C-MAG(R) rotatable magnetron made of another material. Owing to the target rotation, the first material is brought into the sputtering zone of the C-MAG(R) magnetron and then sputtered off together with the second material. Thus, a mixture of materials is sputtered off the rotatable cylindrical target. Mixed films of Al/Zr and Al2O3/ZrO2 were deposited using serial cosputtering onto stationary substrates to characterize this process. The distributions of deposition rate, composition and refractive indices were analyzed.

引用

页码：46 / 51

页数：6

共 19 条

[1]

BARNEY BP, 1990, 33RD ANN TECHN C P, P43

[2] REACTIVE COSPUTTERING OF OXIDES AND NITRIDES USING A C-MAGTM ROTATABLE CYLINDRICAL CATHODE [J].

BELKIND, A ;

GERRISTEAD, W ;

ORBAN, Z ;

DOW, D ;

FELTS, J ;

LAIRD, R .

SURFACE & COATINGS TECHNOLOGY, 1991, 49 (1-3) :155-160

[3] COSPUTTERING OF ALLOYS .1. COSPUTTERING OF OXIDES AND NITRIDES USING 2 PLANAR MAGNETRONS [J].

BELKIND, A ;

EZELL, E ;

GERRISTEAD, W ;

ORBAN, Z ;

RAFALKO, P ;

DOW, D ;

FELTS, J ;

LAIRD, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03) :530-536

[4] DEPOSITION RATE DISTRIBUTION IN A ROTATABLE CYLINDRICAL CATHODE SYSTEM [J].

BELKIND, A ;

GERRISTEAD, W ;

ORBAN, Z .

THIN SOLID FILMS, 1992, 207 (1-2) :319-323

[5]

BELKIND A, IN PRESS

[6]

BETZ G, 1983, SPUTTERING PARTICLE, V2, P30

[7]

BROESE E, 1987, NATURWISS REIHE, V53, P7

[8] STABILIZED ZIRCONIA ALUMINA THIN-FILMS [J].

GILMORE, CM ;

QUINN, C ;

SKELTON, EF ;

GOSSETT, CR ;

QADRI, SB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2598-2600

[9] STABILIZATION OF TETRAGONAL ZRO2 WITH AL2O3 IN REACTIVE MAGNETRON SPUTTERED THIN-FILMS [J].

GILMORE, CM ;

QUINN, C ;

QADRI, SB ;

GOSSETT, CR ;

SKELTON, EF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2085-2087

[10]

HANAK JJ, 1975, VIDE, V175, P11

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