DIRECT EVIDENCE OF POROSITY IN CARBON-RICH HYDROGENATED AMORPHOUS-SILICON CARBIDE FILMS

被引：23

作者：

ARCE, R ^{[1
]}

KOROPECKI, RR ^{[1
]}

BUITRAGO, RH ^{[1
]}

ALVAREZ, F ^{[1
]}

CHAMBOULEYRON, I ^{[1
]}

机构：

[1] UNIV ESTADUAL CAMPINAS,INST FIS,BR-13081 CAMPINAS,SP,BRAZIL

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 09期

关键词：

D O I：

10.1063/1.343926

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4544 / 4546

页数：3

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