FABRICATION OF DIAMOND TIPS BY THE MICROWAVE PLASMA CHEMICAL-VAPOR-DEPOSITION TECHNIQUE

被引:24
作者
LIU, N
MA, Z
CHU, X
HU, T
XUE, Z
JIANG, X
PANG, S
机构
[1] BEIJING UNIV,DEPT RADIO ELECTR,BEIJING 100871,PEOPLES R CHINA
[2] CHINESE ACAD SCI,BEIJING RES & DEV CTR SCI INSTRUMENTS,BEIJING 100080,PEOPLES R CHINA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 03期
关键词
D O I
10.1116/1.587583
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Scanning tunneling electron microscopy (STM) has recently shown great promise for surface modification in the nanometer regime. As is well known, the normal STM tips are easily damaged by mechanical contact with the sample surface in most cases. In this paper we describe a new type of diamond STM tip prepared by the microwave plasma chemical vapor deposition technique. The reactant is a gas mixture of methane and hydrogen. Diamond crystals are grown on a tungsten tip. The diamond tips are very hard and always have enough electrical conductivity for STM experiments. They can be used as a machining tool to scratch the metal surfaces.
引用
收藏
页码:1712 / 1715
页数:4
相关论文
共 16 条
[1]  
CHANG Z, 1992, VAC SCI TECHNOL, V12, P275
[2]   DIAMOND TIPS AND NANOMETER-SCALE MECHANICAL POLISHING [J].
CHANG, ZP ;
MA, ZL ;
SHEN, JA ;
CHU, X ;
ZHU, CX ;
WANG, J ;
PANG, SJ ;
XUE, ZQ .
APPLIED SURFACE SCIENCE, 1993, 70-1 :407-412
[3]   HARDNESS DEMONSTRATION OF DIAMOND TIPS BY NANOMETER-SCALE CONTROLLED SCRATCHING ON METALLIC SURFACES [J].
CHU, X ;
MA, Z ;
LIU, N ;
CHANG, ZP ;
HU, TM ;
XUE, ZQ ;
PANG, SJ .
APPLIED PHYSICS LETTERS, 1993, 63 (25) :3446-3448
[4]   DETAILED SURFACE AND GAS-PHASE CHEMICAL-KINETICS OF DIAMOND DEPOSITION [J].
FRENKLACH, M ;
WANG, H .
PHYSICAL REVIEW B, 1991, 43 (02) :1520-1545
[5]   DIAMOND FORCE MICROSCOPE TIPS FABRICATED BY CHEMICAL VAPOR-DEPOSITION [J].
GERMANN, GJ ;
MCCLELLAND, GM ;
MITSUDA, Y ;
BUCK, M ;
SEKI, H .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (09) :4053-4055
[6]   DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J].
KAMO, M ;
SATO, Y ;
MATSUMOTO, S ;
SETAKA, N .
JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) :642-644
[7]   ION-IMPLANTED DIAMOND TIP FOR A SCANNING TUNNELING MICROSCOPE [J].
KANEKO, R ;
OGUCHI, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1990, 29 (09) :1854-1855
[8]   DIAMOND-COATED TIPS AND THEIR APPLICATIONS [J].
LIU, N ;
MA, Z ;
CHU, X ;
HU, T ;
XUE, Z ;
PANG, S .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (03) :1856-1859
[9]   GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS [J].
MATSUMOTO, S ;
SATO, Y ;
TSUTSUMI, M ;
SETAKA, N .
JOURNAL OF MATERIALS SCIENCE, 1982, 17 (11) :3106-3112
[10]   CHEMICAL VAPOR-DEPOSITION OF DIAMOND IN RF GLOW-DISCHARGE [J].
MATSUMOTO, S .
JOURNAL OF MATERIALS SCIENCE LETTERS, 1985, 4 (05) :600-602