ENHANCED PROTECTION OF GAAS AGAINST THERMAL SURFACE DEGRADATION BY ENCAPSULATED ANNEALING IN AN ARSINE AMBIENT

被引：8

作者：

CAMPBELL, PM

AINA, O

BALIGA, BJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 01期

关键词：

D O I：

10.1063/1.94982

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：95 / 97

页数：3

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