REACTION BETWEEN REACTION-BONDED SI3N4 AND TITANIUM THIN-FILMS

被引：5

作者：

KAGAWA, Y

机构：

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1985年 / 4卷 / 09期

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D O I：

10.1007/BF00720416

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：1062 / 1066

页数：5

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