ELLIPSOMETRY FOR THIN-FILM AND SURFACE-ANALYSIS

被引：34

作者：

COLLINS, RW ^{[1
]}

KIM, YT ^{[1
]}

机构：

[1] PENN STATE UNIV,DEPT PHYS,UNIVERSITY PK,PA 16802

来源：

ANALYTICAL CHEMISTRY | 1990年 / 62卷 / 17期

关键词：

D O I：

10.1021/ac00216a001

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

[No abstract available]

引用

页码：A887 / &

共 31 条

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