PRESENT STATUS OF AUTOMATIC ELLIPSOMETERS

被引：41

作者：

MULLER, RH

机构：

[1] UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB,DIV INORG MAT RES,BERKELEY,CA 94720

[2] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720

来源：

SURFACE SCIENCE | 1976年 / 56卷 / 01期

关键词：

D O I：

10.1016/0039-6028(76)90431-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：19 / 36

页数：18

相关论文

共 55 条

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[8] ANALYSIS OF SYSTEMATIC-ERRORS IN ROTATING-ANALYZER ELLIPSOMETERS
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[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (11) : 1459 - 1469
[9] AZZAM RMA, 1976, REV SCI INSTR, V47
[10] BASHARA NM, 1972, TECHNIQUES CHEMIS 3C, V1, P484

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