SEM, AUGER-SPECTROSCOPY AND ION BACKSCATTERING TECHNIQUES APPLIED TO ANALYSES OF AU-REFRACTORY METALLIZATIONS

被引:10
作者
CHRISTOU, A [1 ]
JARVIS, L [1 ]
WEISENBERGER, WH [1 ]
HIRVONEN, JK [1 ]
机构
[1] USN, RES LAB, WASHINGTON, DC 20375 USA
关键词
D O I
10.1007/BF02655409
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:329 / 345
页数:17
相关论文
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