HELIUM-ION IMPLANTED WAVE-GUIDES IN ZIRCON

被引:28
作者
BABSAIL, L
HAMELIN, N
TOWNSEND, PD
机构
[1] MAPS, University of Sussex, Brighton
关键词
D O I
10.1016/0168-583X(91)95797-H
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Zircon can be amorphised by ion implantation and the damaged layer is of a lower refractive index than the original crystal. This index change has been used to define optical waveguides. Data are presented on the refractive-index profiles, their dose dependence and the effects of different implant temperatures. Annealing studies reveal an interesting pattern in which below 350-degrees-C the index change is reduced, but at higher temperatures it is re-established. The details of the annealing effects are dose dependent. A defect model is discussed. Finally, the possibility of rare-earth doped zircon laser waveguides is mentioned.
引用
收藏
页码:1219 / 1222
页数:4
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