REAL-TIME MONITORING OF EPITAXIAL PROCESSES BY PARALLEL-POLARIZED REFLECTANCE SPECTROSCOPY

被引：20

作者：

DIETZ, N

BACHMANN, KJ

机构：

来源：

MRS BULLETIN | 1995年 / 20卷 / 05期

关键词：

D O I：

10.1557/S0883769400044894

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：49 / 55

页数：7

共 24 条

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[3] REAL-TIME OPTICAL DIAGNOSTICS FOR EPITAXIAL-GROWTH
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03): : 870 - 875
[4] ASPNES DE, 1990, P SOC PHOTO-OPT INS, V1285, P2, DOI 10.1117/12.20801
[5] REFLECTANCE-DIFFERENCE SPECTROSCOPY SYSTEM FOR REAL-TIME MEASUREMENTS OF CRYSTAL-GROWTH
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[6] PSEUDO-BREWSTER AND 2ND-BREWSTER ANGLES OF AN ABSORBING SUBSTRATE COATED BY A TRANSPARENT THIN-FILM
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[J]. APPLIED OPTICS, 1983, 22 (24): : 4155 - 4165
[7] BACHMANN KJ, IN PRESS J VAC SCI A, V13
[8] DIETZ N, 1994, MATER RES SOC SYMP P, V324, P27
[9] AN OPTICAL INSITU METHOD FOR LAYER GROWTH-CHARACTERIZATION
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[J]. APPLIED SURFACE SCIENCE, 1993, 69 (1-4) : 350 - 354
[10] REAL-TIME MONITORING OF HOMOEPITAXIAL AND HETEROEPITAXIAL PROCESSES BY P-POLARIZED REFLECTANCE SPECTROSCOPY
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (01): : 153 - 155

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