DETERMINATION OF THE OXYGEN PRECIPITATE FREE ZONE WIDTH IN SILICON-WAFERS FROM SURFACE PHOTO-VOLTAGE MEASUREMENTS

被引：5

作者：

CHAPPELL, TI

CHYE, PW

TAVEL, MA

机构：

来源：

SOLID-STATE ELECTRONICS | 1983年 / 26卷 / 01期

关键词：

D O I：

10.1016/0038-1101(83)90158-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：33 / 36

页数：4

共 11 条

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