MORPHOLOGY MODIFICATION BY HIGH-ENERGY ION-BEAM BOMBARDMENT CONCURRENT WITH TIN FILM GROWTH

被引：6

作者：

WANG, X

MARTIN, P

机构：

[1] CSIRO Division of Applied Physics, Sydney

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1994年 / 13卷 / 18期

关键词：

D O I：

10.1007/BF00624482

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：1317 / 1319

页数：3

共 12 条

[1]

AUCIELLO O, 1984, ION BOMBARDMENT MODI, P1

[2]

BANKS BA, 1989, HDB ION BEAM PROCESS, P338

[3] EFFECT OF ENERGETIC NEUTRALIZED NOBLE-GAS IONS ON THE STRUCTURE OF ION-BEAM SPUTTERED THIN METAL-FILMS [J].

KAY, E ;

PARMIGIANI, F ;

PARRISH, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (01) :44-51

[4]

KAY E, 1989, HDB ION BEAM PROCESS, P182

[5] STRUCTURE MODIFICATION BY ION-BOMBARDMENT DURING DEPOSITION [J].

MATTOX, DM ;

KOMINIAK, GJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01) :528-&

[6]

Robinson R.S., 1984, ION BOMBARDMENT MODI, P299

[7] STRUCTURE AND PROPERTIES OF TIN COATINGS [J].

SUNDGREN, JE .

THIN SOLID FILMS, 1985, 128 (1-2) :21-44

[8] HIGH-RATE THICK-FILM GROWTH [J].

THORNTON, JA .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1977, 7 :239-260

[9]

WILSON IH, 1989, SURF TOPOGR, V2, P289

[10]

XI W, 1992, MAT SCI ENG A-STRUCT, V156, P91, DOI 10.1016/0921-5093(92)90419-2

← 1 2 →