ON SPECIMEN PREPARATION BY RADIOFREQUENCY PLANAR MAGNETRON SPUTTERING

被引：2

作者：

OCHIAI, Y

ASO, K

HAYAKAWA, M

MATSUDA, H

HAYASHI, K

ISHIKAWA, W

IWASAKI, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 01期

关键词：

D O I：

10.1116/1.573491

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：19 / 25

页数：7

共 13 条

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