ANALYSIS OF POLYMER ABLATION

被引：10

作者：

KLEINSCHMIDT, J

WALTHER, JU

机构：

[1] Faculty of Physics and Astronomy, Institute of Optics and Quantumelectronics, Friedrich-Schiller-University, Jena

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1992年 / 131卷 / 01期

关键词：

D O I：

10.1002/pssa.2211310128

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A rate equation model is used to explain UV laser ablation of the organic polymer polymethylmethacrylate (PMMA). The etch depth per laser pulse and the threshold condition for ablation are calculated. The so-called 'incubation' phenomenon is discussed.

引用

页码：167 / 178

页数：12

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