FORMATION OF MOLYBDENUM NITRIDE FILMS BY ION-BEAM AND VAPOR-DEPOSITION METHOD

被引：24

作者：

FUJIMOTO, F

NAKANE, Y

SATOU, M

KOMORI, F

OGATA, K

ANDOH, Y

机构：

[1] GOVT IND RES INST, IKEDA, OSAKA 563, JAPAN

[2] UNIV TOKYO, DEPT PHYS, TOKYO 113, JAPAN

[3] VICTOR CO JAPAN, YAMATO, KANAGAWA 242, JAPAN

[4] NISSIN ELECT CO LTD, KYOTO 615, JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80159-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：791 / 796

页数：6

共 15 条

[1] PROPERTIES OF BORON-NITRIDE COATING FILMS PREPARED BY THE ION-BEAM AND VAPOR-DEPOSITION METHOD (IVD)
ANDOH, Y
OGATA, K
SUZUKI, Y
KAMIJO, E
SATOU, M
FUJIMOTO, F
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 787 - 790
[2] A NEW MACHINE FOR FILM FORMATION BY ION AND VAPOR-DEPOSITION
ANDOH, Y
SUZUKI, Y
MATSUDA, K
SATOU, M
FUJIMOTO, F
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) : 111 - 115
[3] ELECTRONIC-STRUCTURES OF B1 MON, FCC MO2N, AND HEXAGONAL MON
IHARA, H
KIMURA, Y
SENZAKI, K
KEZUKA, H
HIRABAYASHI, M
[J]. PHYSICAL REVIEW B, 1985, 31 (05): : 3177 - 3178
[4] IHARA H, 1986, IN PRESS ADV CRYOGEN, V31
[5] SUPERCONDUCTIVITY IN MON FILMS WITH NACL STRUCTURE
LINKER, G
SMITHEY, R
MEYER, O
[J]. JOURNAL OF PHYSICS F-METAL PHYSICS, 1984, 14 (07): : L115 - L119
[6] ELECTRONIC-PROPERTIES OF TRANSITION-METAL NITRIDES - THE GROUP-V AND GROUP-VI NITRIDES VN, NBN, TAN, CRN, MON, AND WN
PAPACONSTANTOPOULOS, DA
PICKETT, WE
KLEIN, BM
BOYER, LL
[J]. PHYSICAL REVIEW B, 1985, 31 (02) : 752 - 761
[7] THEORETICAL PREDICTION OF MON AS A HIGH T-C SUPERCONDUCTOR
PICKETT, WE
KLEIN, BM
PAPACONSTANTOPOULOS, DA
[J]. PHYSICA B & C, 1981, 107 (1-3): : 667 - 668
[8] NITRIDE FILM FORMATION BY ION AND VAPOR-DEPOSITION
SATOU, M
YAMAGUCHI, K
ANDOH, Y
SUZUKI, Y
MATSUDA, K
FUJIMOTO, F
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 910 - 914
[9] COATING FILMS OF TITANIUM NITRIDE PREPARED BY ION AND VAPOR-DEPOSITION METHOD
SATOU, M
ANDOH, Y
OGATA, K
SUZUKI, Y
MATSUDA, K
FUJIMOTO, F
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (06): : 656 - 660
[10] FORMATION OF CUBIC BORON-NITRIDE FILMS BY BORON EVAPORATION AND NITROGEN ION-BEAM BOMBARDMENT
SATOU, M
FUJIMOTO, F
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (03): : L171 - L172

← 1 2 →