IMPURITY DOPING EFFECT ON THE DISLOCATION DENSITY IN GAAS ON SI (100) GROWN BY MIGRATION-ENHANCED EPITAXY

被引:15
作者
NOZAWA, K
HORIKOSHI, Y
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 11期
关键词
D O I
10.1143/JJAP.28.L1877
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L1877 / L1879
页数:3
相关论文
共 14 条
[1]   EFFECT OF INSITU AND EXSITU ANNEALING ON DISLOCATIONS IN GAAS ON SI SUBSTRATES [J].
CHOI, C ;
OTSUKA, N ;
MUNNS, G ;
HOUDRE, R ;
MORKOC, H ;
ZHANG, SL ;
LEVI, D ;
KLEIN, MV .
APPLIED PHYSICS LETTERS, 1987, 50 (15) :992-994
[2]   DISLOCATION REDUCTION BY IMPURITY DIFFUSION IN EPITAXIAL GAAS GROWN ON SI [J].
DEPPE, DG ;
HOLONYAK, N ;
HSIEH, KC ;
NAM, DW ;
PLANO, WE ;
MATYI, RJ ;
SHICHIJO, H .
APPLIED PHYSICS LETTERS, 1988, 52 (21) :1812-1814
[3]  
FAN JCC, 1986, MAT RES SOC S P, V67
[4]   EFFECTIVENESS OF ALGAAS/GAAS SUPERLATTICES IN REDUCING DISLOCATION DENSITY IN GAAS ON SI [J].
HAYAFUJI, N ;
OCHI, S ;
MIYASHITA, M ;
TSUGAMI, M ;
MUROTANI, T ;
KAWAGISHI, A .
JOURNAL OF CRYSTAL GROWTH, 1988, 93 (1-4) :494-498
[5]   MIGRATION-ENHANCED EPITAXY OF GAAS AND ALGAAS [J].
HORIKOSHI, Y ;
KAWASHIMA, M ;
YAMAGUCHI, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1988, 27 (02) :169-179
[6]   LOW-TEMPERATURE SURFACE CLEANING OF SILICON AND ITS APPLICATION TO SILICON MBE [J].
ISHIZAKA, A ;
SHIRAKI, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (04) :666-671
[7]   EFFECTS OF INDIUM DOPING ON CRYSTALLINE QUALITIES OF GAAS ON SI BY MOLECULAR-BEAM EPITAXY [J].
OHBU, I ;
ISHINO, M ;
MOZUME, T .
APPLIED PHYSICS LETTERS, 1989, 54 (04) :396-397
[8]   DISLOCATION REDUCTION IN GAAS ON SI BY THERMAL CYCLES AND INGAAS/GAAS STRAINED-LAYER SUPERLATTICES [J].
OKAMOTO, H ;
WATANABE, Y ;
KADOTA, Y ;
OHMACHI, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (12) :L1950-L1952
[9]   DISLOCATION-DENSITY STUDIES IN MOCVD GAAS ON SI SUBSTRATES [J].
SHIMIZU, M ;
ENATSU, M ;
FURUKAWA, M ;
MIZUKI, T ;
SAKURAI, T .
JOURNAL OF CRYSTAL GROWTH, 1988, 93 (1-4) :475-480
[10]   MOCVD GROWTH OF GAAS ON SI SUBSTRATES WITH ALGAP AND STRAINED SUPERLATTICE LAYERS [J].
SOGA, T ;
HATTORI, S ;
SAKAI, S ;
TAKEYASU, M ;
UMENO, M .
ELECTRONICS LETTERS, 1984, 20 (22) :916-918