PROPERTIES OF TICN COATINGS PREPARED BY MAGNETRON SPUTTERING

TiCN coatings were deposited onto AISI 420 substrates by a magnetron sputtering technique using a reactive gaseous mixture of methane and nitrogen. The structure and composition of the coatings have been analyzed by x-ray diffraction and Rutherford backscattering spectrometry. In addition, the microhardness, friction coefficient, and wear behavior of the coatings were also measured. The influence of deposition parameters on the characteristics of the coatings has been investigated. The experimental results show that the TiCN coatings exhibit a strong (111) or (200) preferred orientation. The maximum hardness of the coating is about 3648 kg mm-2. Adhesion of the coating is excellent. The maximum scratch test critical load is about 8.2 kg. The characteristics of wear resistance for the TiCN coatings are also excellent in comparison with either pure TiN or TiC coatings.