X-RAY PHOTOELECTRON-SPECTROSCOPY SURFACE-CHARGE BUILDUP USED TO STUDY RESIDUE IN DEEP FEATURES ON INTEGRATED-CIRCUITS

被引：22

作者：

THOMAS, JH

BRYSON, CE

PAMPALONE, TR

机构：

[1] RCA CORP,CTR MICROELECTR,SOMERVILLE,NJ 08876

[2] KEVEX CORP,GLENN T SEABOR LAB,FOSTER CITY,CA 94404

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 04期

关键词：

D O I：

10.1116/1.584301

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1081 / 1086

页数：6

共 29 条

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