ROUGHNESS CONTRIBUTIONS TO RESOLUTION IN ION SPUTTER DEPTH PROFILES OF POLYCRYSTALLINE METAL-FILMS

被引:38
作者
SEAH, MP
JONES, ME
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D O I
10.1016/0040-6090(84)90181-0
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T [工业技术];
学科分类号
08 ;
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页码:203 / 216
页数:14
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