ROUGHNESS CONTRIBUTIONS TO RESOLUTION IN ION SPUTTER DEPTH PROFILES OF POLYCRYSTALLINE METAL-FILMS

被引：38

作者：

SEAH, MP

JONES, ME

机构：

来源：

THIN SOLID FILMS | 1984年 / 115卷 / 03期

关键词：

D O I：

10.1016/0040-6090(84)90181-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：203 / 216

页数：14

共 41 条

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