GAAS ALGAAS MATERIAL MODIFICATIONS INDUCED BY FOCUSED GA ION-BEAM IMPLANTATION

被引：16

作者：

HIRAYAMA, Y

OKAMOTO, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.584339

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1018 / 1021

页数：4

共 20 条

[1] OPTICALLY DETECTED CARRIER CONFINEMENT TO ONE AND ZERO DIMENSION IN GAAS QUANTUM-WELL WIRES AND BOXES
CIBERT, J
PETROFF, PM
DOLAN, GJ
PEARTON, SJ
GOSSARD, AC
ENGLISH, JH
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (19) : 1275 - 1277
[2] KINETICS OF IMPLANTATION ENHANCED INTERDIFFUSION OF GA AND AL AT GAAS-GAXAL1-XAS INTERFACES
CIBERT, J
PETROFF, PM
WERDER, DJ
PEARTON, SJ
GOSSARD, AC
ENGLISH, JH
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (04) : 223 - 225
[3] CIBERT J, 1987, PHYS REV B, V36, P3234
[4] IMPLANTATION DISORDERING OF ALXGA1-XAS SUPERLATTICES
GAVRILOVIC, P
DEPPE, DG
MEEHAN, K
HOLONYAK, N
COLEMAN, JJ
BURNHAM, RD
[J]. APPLIED PHYSICS LETTERS, 1985, 47 (02) : 130 - 132
[5] ION-SPECIES DEPENDENCE OF INTERDIFFUSION IN ION-IMPLANTED GAAS-ALAS SUPERLATTICES
HIRAYAMA, Y
SUZUKI, Y
OKAMOTO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1985, 24 (11): : 1498 - 1502
[6] FABRICATION OF A GAAS QUANTUM-WELL-WIRE STRUCTURE BY GA FOCUSED-ION-BEAM IMPLANTATION AND ITS OPTICAL-PROPERTIES
HIRAYAMA, Y
TARUCHA, S
SUZUKI, Y
OKAMOTO, H
[J]. PHYSICAL REVIEW B, 1988, 37 (05): : 2774 - 2777
[7] ELECTRICAL-PROPERTIES OF GA ION-BEAM IMPLANTED GAAS EPILAYER
HIRAYAMA, Y
OKAMOTO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1985, 24 (12): : L965 - L967
[8] COMPOSITIONAL DISORDERING OF GAAS-ALXGA1-XAS SUPERLATTICE BY GA FOCUSED ION-BEAM IMPLANTATION AND ITS APPLICATION TO SUB-MICRON STRUCTURE FABRICATION
HIRAYAMA, Y
SUZUKI, Y
TARUCHA, S
OKAMOTO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1985, 24 (07): : L516 - L518
[9] HIRAYAMA Y, 1986, UNPUB P ELECTRONICS
[10] LATERAL GAAS PHOTODETECTOR FABRICATED BY GA FOCUSED-ION-BEAM IMPLANTATION
IGUCHI, H
HIRAYAMA, Y
OKAMOTO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1986, 25 (07): : L560 - L563

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