FILM THICKNESS MEASUREMENTS USING ELLIPSOMETRY WHEN THE LOWER INTERFACE IS UNCHARACTERIZED

被引：5

作者：

TOMPKINS, HG

机构：

来源：

THIN SOLID FILMS | 1989年 / 181卷

关键词：

D O I：

10.1016/0040-6090(89)90496-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：285 / 294

页数：10

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