LIFETIME AND DRIFT VELOCITY ANALYSIS FOR ELECTROMIGRATION IN SPUTTERED AL FILMS, MULTILAYERS, AND ALLOYS

被引：34

作者：

GRABE, B

SCHREIBER, HU

机构：

来源：

SOLID-STATE ELECTRONICS | 1983年 / 26卷 / 10期

关键词：

D O I：

10.1016/0038-1101(83)90080-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：1023 / &

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