HIGH-POWER MICROWAVE-INDUCED PLASMA SOURCE FOR TRACE-ELEMENT ANALYSIS

被引:63
作者
OKAMOTO, Y
YASUDA, M
MURAYAMA, S
机构
[1] Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1990年 / 29卷 / 04期
关键词
Annular-shaped plasma; Atmospheric pressure plasma; Circularly polarized wave excitation; Emission spectrometer; Inductively coupled plasma; Microwave-induced plasma; Trace element analysis;
D O I
10.1143/JJAP.29.L670
中图分类号
O59 [应用物理学];
学科分类号
摘要
A high-power microwave-induced plasma source (2.45 GHz, 1.2 kW) for trace element analysis is presented. The plasma is generated by a circularly polarized wave induced by a helical coil with a mode transformer. The sample introduction system consists of a pneumatic nebulizer with no dehydration system, i.e., utilizing direct introduction of aqueous solutions. An annular-shaped argon plasma was generated at atmospheric pressure in a 2.3-4.2-mm i.d. quartz discharge tube with a low gas flow rate (2 l/min). Preliminary analytical results were otained using an aqueous Ca(10 ppm)+Zr(200 ppm) solution sample and compared to those obtained with the argon inductively coupled plasma. © 1990 IOP Publishing Ltd.
引用
收藏
页码:L670 / L672
页数:3
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