CALCULATION OF THE SHEAR STRESSES IN (111)-SEMICONDUCTOR AND (001)-SEMICONDUCTOR SUBSTRATES WITH FILM EDGES

被引：2

作者：

FISCHER, A

机构：

来源：

CRYSTAL RESEARCH AND TECHNOLOGY | 1985年 / 20卷 / 01期

关键词：

D O I：

10.1002/crat.2170200114

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：65 / 72

页数：8

共 9 条

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