FEDSS - A 2D SEMICONDUCTOR FABRICATION PROCESS SIMULATOR

被引：20

作者：

BORUCKI, L

HANSEN, HH

VARAHRAMYAN, K

机构：

[1] IBM, Advanced Mathematics &, Engineering Analysis Dep, Essex, Junction, VT, USA, IBM, Advanced Mathematics & Engineering Analysis Dep, Essex Junction, VT, USA

来源：

IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1985年 / 29卷 / 03期

关键词：

D O I：

10.1147/rd.293.0263

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

SEMICONDUCTOR DEVICE MANUFACTURE

引用

页码：263 / 276

页数：14

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