共 33 条
[21]
STUDIES OF PLASMA-ETCHING OF III-V COMPOUNDS - THE EFFECTS OF TEMPERATURE AND DISCHARGE FREQUENCY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1982, 20 (03)
:489-490
[25]
OPTICAL WAVEGUIDES IN GAAS-AIGAAS EPITAXIAL LAYERS
[J].
JOURNAL OF APPLIED PHYSICS,
1973, 44 (09)
:4172-4176
[29]
STULZ LW, UNPUB