RAMAN-SCATTERING OF SIC - ESTIMATION OF THE INTERNAL-STRESS IN 3C-SIC ON SI

被引：76

作者：

MUKAIDA, H ^{[1
]}

OKUMURA, H ^{[1
]}

LEE, JH ^{[1
]}

DAIMON, H ^{[1
]}

SAKUMA, E ^{[1
]}

MISAWA, S ^{[1
]}

ENDO, K ^{[1
]}

YOSHIDA, S ^{[1
]}

机构：

[1] ELECTROTECH LAB,SAKURA,IBARAKI 305,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 01期

关键词：

D O I：

10.1063/1.339191

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：254 / 257

页数：4

共 14 条

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