TANTALUM AND COBALT SILICIDES - TEMPERATURE SENSOR APPLICATIONS

被引：6

作者：

COLLINS, RA ^{[1
]}

JOHNSTON, DFC ^{[1
]}

DEARNALEY, G ^{[1
]}

机构：

[1] AERE,DIV NUCL PHYS,HARWELL OX11 0RA,OXON,ENGLAND

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1986年 / 40卷 / 02期

关键词：

D O I：

10.1007/BF00616486

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：109 / 117

页数：9

共 14 条

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[4]

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[6] REFRACTORY SILICIDES FOR INTEGRATED-CIRCUITS [J].

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[7]

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[9] REVIEW OF BINARY ALLOY FORMATION BY THIN-FILM INTERACTIONS [J].

OTTAVIANI, G .

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[10]

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