ION-BEAM PROCESSING FOR INDUSTRIAL APPLICATIONS

被引：32

作者：

HIRVONEN, JK

机构：

[1] Spire Corp, United States

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1989年 / 116卷 / 1 -2 pt 2期

关键词：

Bearings - Biomedical Equipment - Prosthetics--Wear - Surfaces--Modification;

D O I：

10.1016/0921-5093(89)90142-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ion beam processing, well established in the semiconductor industry, is steadily evolving in a wide diversity of other applications. Its acceptance depends on technical merit, economic considerations, competing processes and highly individual barriers to acceptance for each particular application. In this paper, some of the most advanced applications of ion beam processing are discussed in the framework of the considerations mentioned above. Application areas include tooling, medical products and aerospace components such as precision bearings. Examples of recent surface modification developments involving ion implantation and ion-assisted deposition are discussed and compared from an industrial perspective.

引用

页码：167 / 175

页数：9

共 46 条

[21]

JOHNSON EA, UNPUB APPL PHYS LETT

[22] ADHERENT TIN FILMS PRODUCED BY ION-BEAM ENHANCED DEPOSITION AT ROOM-TEMPERATURE [J].