BOLTZMANN-MATANO ANALYSIS OF BORON PROFILES IN SILICON

被引：7

作者：

KIM, C

ZHU, ZY

KANG, RI

SHONO, K

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 12期

关键词：

D O I：

10.1149/1.2115450

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2962 / 2964

页数：3

共 13 条

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[7]

KIM C, 1984, J ELECTROCHEM SOC, V131, P1384, DOI 10.1149/1.2115853

[8]

Matano C., 1933, JPN J APPL PHYS, V8, P109

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