ELECTRON-MOBILITY IN EPITAXIAL SILICON NEAR A SAPPHIRE SUBSTRATE

被引:3
作者
LEHOVEC, K [1 ]
LIN, ST [1 ]
机构
[1] UNIV SO CALIF,LOS ANGELES,CA 90007
关键词
D O I
10.1063/1.322853
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2088 / 2091
页数:4
相关论文
共 19 条
[1]   THIN-FILM SILICON - PREPATATION, PROPERTIES, AND DEVICE APPLICATIONS [J].
ALLISON, JF ;
DUMIN, DJ ;
HEIMAN, FP ;
MUELLER, CW ;
ROBINSON, PH .
PROCEEDINGS OF THE IEEE, 1969, 57 (09) :1490-+
[2]   ANALYSIS OF EXCITATION AND DETECTION OF PIEZOELECTRIC SURFACE WAVES IN QUARTZ BY MEANS OF SURFACE ELECTRODES [J].
COQUIN, GA ;
TIERSTEN, HF .
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1967, 41 (4P2) :921-&
[3]   COMPARISON OF SEMICONDUCTING PROPERTIES OF THIN-FILMS OF SILICON ON SAPPHIRE AND SPINEL [J].
CULLEN, GW ;
CORBOY, JF .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (10) :1345-1350
[4]  
Dumin D. J., 1968, Journal of Crystal Growth, V3-4, P214, DOI 10.1016/0022-0248(68)90133-4
[5]   AUTODOPING OF SILICON FILMS GROWN EPITAXIALLY ON SAPPHIRE [J].
DUMIN, DJ ;
ROBINSON, PH .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (05) :469-+
[6]   INVESTIGATION OF CARRIER TRANSPORT IN THIN SILICON-ON-SAPPHIRE FILMS USING MIS DEEP DEPLETION HALL-EFFECT STRUCTURES [J].
ELLIOT, ABM ;
ANDERSON, JC .
SOLID-STATE ELECTRONICS, 1972, 15 (05) :531-+
[7]   INVESTIGATION OF SILICON-SAPPHIRE INTERFACE USING MIS CAPACITANCE METHOD [J].
GOODMAN, AM .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (02) :63-65
[9]  
HSU ST, 1975, RCA REV, V36, P240
[10]   HALL-EFFECT IN SILICON ON SAPPHIRE [J].
HYNECEK, J .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (06) :2806-2807