INTERFACE ROUGHENING IN SURFACTANT DEPOSITION

被引:14
作者
HASEGAWA, S [1 ]
RYLAND, RG [1 ]
WILLIAMS, ED [1 ]
机构
[1] OSAKA UNIV,INST SCI & IND RES,IBARAKI,OSAKA 567,JAPAN
关键词
D O I
10.1063/1.112583
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on a scanning tunneling microscopy study demonstrating silicon mass transport and the resulting roughening of the surface during Sb deposition on Si(111). It is found that small amounts of Sb, which cause the Sb-induced d-(7×7) reconstruction, lead to Si island formation due to the replacement of Si atoms by Sb. The succeeding adsorption of Sb causes formation of pits in addition to the islands, in parallel with the structural transition to a (2×1) or (3×3) reconstruction. The extent of the roughening is directly related to the changes of surface Si atom density induced by Sb adsorption. © 1994 American Institute of Physics.
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页码:2609 / 2611
页数:3
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共 16 条
  • [1] PHOTOELECTRON DIFFRACTION STUDY OF THE ATOMIC GEOMETRY OF THE SI(111)SQUARE-ROOT-3 X SQUARE-ROOT-3-SB SURFACE
    ABUKAWA, T
    PARK, CY
    KONO, S
    [J]. SURFACE SCIENCE, 1988, 201 (03) : L513 - L518
  • [2] ANTIMONY ADSORPTION ON SILICON (111) ANALYZED IN REAL-TIME BY INSITU ELLIPSOMETRY
    ANDRIEU, S
    DAVITAYA, FA
    [J]. SURFACE SCIENCE, 1989, 219 (1-2) : 277 - 293
  • [3] GEOMETRIC AND LOCAL ELECTRONIC-STRUCTURE OF SI(111)-AS
    BECKER, RS
    SWARTZENTRUBER, BS
    VICKERS, JS
    HYBERTSEN, MS
    [J]. PHYSICAL REVIEW LETTERS, 1988, 60 (02) : 116 - 119
  • [4] SURFACTANTS IN EPITAXIAL-GROWTH
    COPEL, M
    REUTER, MC
    KAXIRAS, E
    TROMP, RM
    [J]. PHYSICAL REVIEW LETTERS, 1989, 63 (06) : 632 - 635
  • [5] GEOMETRIC AND ELECTRONIC-STRUCTURE OF SB ON SI(111) BY SCANNING TUNNELING MICROSCOPY
    ELSWIJK, HB
    DIJKKAMP, D
    VANLOENEN, EJ
    [J]. PHYSICAL REVIEW B, 1991, 44 (08): : 3802 - 3809
  • [6] DC-RESISTIVE-HEATING-INDUCED STEP BUNCHING ON VICINAL SI (111)
    HOMMA, Y
    MCCLELLAND, RJ
    HIBINO, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (12): : L2254 - L2256
  • [7] TRANSFORMATIONS ON CLEAN SI(111) STEPPED SURFACE DURING SUBLIMATION
    LATYSHEV, AV
    ASEEV, AL
    KRASILNIKOV, AB
    STENIN, SI
    [J]. SURFACE SCIENCE, 1989, 213 (01) : 157 - 169
  • [8] EVIDENCE FOR TRIMER RECONSTRUCTION OF SI(111) SQUARE-ROOT-3 X SQUARE-ROOT-3-SB - SCANNING TUNNELING MICROSCOPY AND 1ST-PRINCIPLES THEORY
    MARTENSSON, P
    MEYER, G
    AMER, NM
    KAXIRAS, E
    PANDEY, KC
    [J]. PHYSICAL REVIEW B, 1990, 42 (11): : 7230 - 7233
  • [9] ANTIMONY ADSORPTION ON SILICON
    METZGER, RA
    ALLEN, FG
    [J]. SURFACE SCIENCE, 1984, 137 (2-3) : 397 - 411
  • [10] MIGRATION OF GA ATOMS DURING SI MOLECULAR-BEAM EPITAXIAL-GROWTH ON A GA-ADSORBED SI(111) SURFACE
    NAKAHARA, H
    ICHIKAWA, M
    [J]. SURFACE SCIENCE, 1993, 298 (2-3) : 440 - 449