DEVICE PERFORMANCE DEGRADATION DUE TO HOT CARRIERS HAVING ENERGIES BELOW THE SI-SIO2 ENERGY BARRIER

被引:10
作者
TAKEDA, E [1 ]
HAGIWARA, T [1 ]
SUZUKI, N [1 ]
机构
[1] HITACHI LTD,MUSASHI WORKS,KODAIRA,TOKYO 187,JAPAN
关键词
D O I
10.1063/1.333349
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:3180 / 3182
页数:3
相关论文
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