共 27 条
[2]
CHEMICAL AND STRUCTURAL ASPECTS OF REACTION AT THE TI SI INTERFACE
[J].
PHYSICAL REVIEW B,
1984, 30 (10)
:5421-5429
[3]
ATOMIC SCALE STUDY OF LOCAL TISI2/SI EPITAXIES
[J].
JOURNAL OF APPLIED PHYSICS,
1990, 67 (04)
:1820-1825
[7]
DEHEURLE FM, 1985, IBM RC11151 RES REP