SPECTROSCOPIC CHARACTERIZATION OF FLUORINATED SILICON SINGLE-CRYSTAL SURFACES

被引:40
作者
SHINN, ND
MORAR, JF
MCFEELY, FR
机构
[1] MIT,DEPT CHEM,CAMBRIDGE,MA 02139
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 04期
关键词
D O I
10.1116/1.572474
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1593 / 1594
页数:2
相关论文
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