EFFECT OF ARGON ADDITION TO SICL4-H2 MIXTURES ON THE OPTICAL-PROPERTIES OF GLOW-DISCHARGE SILICON FILMS

被引：9

作者：

BRUNO, G

CAPEZZUTO, P

CRAMAROSSA, F

机构：

来源：

THIN SOLID FILMS | 1985年 / 129卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(85)90048-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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收藏

页码：217 / 226

页数：10

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