DEPOSITION TECHNIQUES AND APPLICATIONS OF AMORPHOUS-SILICON FILMS

[1] OPTICAL-CONSTANTS OF SILICON FILMS DEPOSITED BY THE R.F. GLOW-DISCHARGE OF SICL4 [J]. THIN SOLID FILMS, 1981, 86 (04) : 359 - 367

[2] BILENCHI R, 1981, 8TH P INT C CVD PAR

[3] DEPOSITION OF AMORPHOUS SILICON FILMS FROM GLOW-DISCHARGE PLASMAS OF SILANE [J]. THIN SOLID FILMS, 1977, 40 (JAN) : L23 - L25

[4] ELECTRON SPIN RESONANCE IN AMORPHOUS SILICON, GERMANIUM, AND SILICON CARBIDE [J]. PHYSICAL REVIEW LETTERS, 1969, 23 (11) : 581 - &

[5] RF PLASMA DEPOSITION OF AMORPHOUS-SILICON FILMS FROM SICL4-H2 [J]. THIN SOLID FILMS, 1980, 67 (01) : 103 - 107

[6] BRUNO G, THIN SOLID FILMS

[7] EFFECT OF HYDROGEN CONTENT ON THE PHOTO-VOLTAIC PROPERTIES OF AMORPHOUS SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) : 688 - 691

[8] AMORPHOUS SILICON SOLAR-CELL [J]. APPLIED PHYSICS LETTERS, 1976, 28 (11) : 671 - 673

[9] AMORPHOUS SILICON SOLAR-CELLS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (04) : 449 - 453

[10] CARLSON DE, 1977, Patent No. 4064521

[1] OPTICAL-CONSTANTS OF SILICON FILMS DEPOSITED BY THE R.F. GLOW-DISCHARGE OF SICL4 [J]. THIN SOLID FILMS, 1981, 86 (04) : 359 - 367

[2] BILENCHI R, 1981, 8TH P INT C CVD PAR

[3] DEPOSITION OF AMORPHOUS SILICON FILMS FROM GLOW-DISCHARGE PLASMAS OF SILANE [J]. THIN SOLID FILMS, 1977, 40 (JAN) : L23 - L25

[4] ELECTRON SPIN RESONANCE IN AMORPHOUS SILICON, GERMANIUM, AND SILICON CARBIDE [J]. PHYSICAL REVIEW LETTERS, 1969, 23 (11) : 581 - &

[5] RF PLASMA DEPOSITION OF AMORPHOUS-SILICON FILMS FROM SICL4-H2 [J]. THIN SOLID FILMS, 1980, 67 (01) : 103 - 107

[6] BRUNO G, THIN SOLID FILMS

[7] EFFECT OF HYDROGEN CONTENT ON THE PHOTO-VOLTAIC PROPERTIES OF AMORPHOUS SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) : 688 - 691

[8] AMORPHOUS SILICON SOLAR-CELL [J]. APPLIED PHYSICS LETTERS, 1976, 28 (11) : 671 - 673

[9] AMORPHOUS SILICON SOLAR-CELLS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (04) : 449 - 453

[10] CARLSON DE, 1977, Patent No. 4064521