DIRECT AND FAST COMPARISON OF NEAR-INFRARED ABSORPTION AND PHOTOLUMINESCENCE TOPOGRAPHY OF SEMIINSULATING GAAS WAFERS

被引:26
作者
WETTLING, W
WINDSCHEIF, J
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1986年 / 40卷 / 03期
关键词
D O I
10.1007/BF00617403
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:191 / 195
页数:5
相关论文
共 18 条
[1]  
BAEUMLER M, 1985, MATER RES SOC S P, V46, P201
[2]   DIRECT OBSERVATION OF FINE-STRUCTURE IN THE CONCENTRATION OF THE DEEP DONOR [EL2] AND ITS CORRELATION WITH DISLOCATIONS IN UNDOPED, SEMI-INSULATING GAAS [J].
BROZEL, MR ;
GRANT, I ;
WARE, RM ;
STIRLAND, DJ ;
SKOLNICK, MS .
JOURNAL OF APPLIED PHYSICS, 1984, 56 (04) :1109-1118
[3]   EXPERIMENTAL REQUIREMENTS FOR QUANTITATIVE MAPPING OF MIDGAP FLAW CONCENTRATION IN SEMI-INSULATING GAAS WAFERS BY MEASUREMENT OF NEAR-INFRARED TRANSMITTANCE [J].
DOBRILLA, P ;
BLAKEMORE, JS .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) :208-218
[4]   SYMMETRICAL CONTOURS OF DEEP LEVEL EL2 IN LIQUID ENCAPSULATED CZOCHRALSKI GAAS [J].
HOLMES, DE ;
CHEN, RT ;
ELLIOTT, KR ;
KIRKPATRICK, CG .
APPLIED PHYSICS LETTERS, 1983, 43 (03) :305-307
[6]  
JOKOGAWA M, 1984, JPN J APPL PHYS, V23, pL339
[7]   STUDY OF 2 DIFFERENT DEEP LEVELS IN UNDOPED LEC SI-GAAS BY PHOTO-LUMINESCENCE SPECTROSCOPY [J].
KIKUTA, T ;
TERASHIMA, K ;
ISHIDA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (07) :L409-L411
[8]   NONUNIFORM PHOTO-LUMINESCENCE INTENSITY DISTRIBUTION ON SEMI-INSULATING GAAS AND EFFECTS OF CR AND DISLOCATIONS [J].
KITAHARA, K ;
OZEKI, M ;
SHIBATOMI, A .
APPLIED PHYSICS LETTERS, 1983, 42 (02) :188-190
[9]   ONE-DIMENSIONAL PHOTO-LUMINESCENCE DISTRIBUTION IN SEMI-INSULATING GAAS GROWN BY CZ AND HB METHODS [J].
KITAHARA, K ;
NAKAI, K ;
SHIBATOMI, S .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (04) :880-883
[10]  
LOOK DC, 1984, SEMIINSULATING 3 5 M