PRIMARY ELECTRON ORBIT CALCULATION IN A BUCKET-TYPE ION-SOURCE FOR ION MILLING

被引：3

作者：

ONO, Y ^{[1
]}

HAKAMATA, Y ^{[1
]}

SATO, T ^{[1
]}

HASHIMOTO, I ^{[1
]}

机构：

[1] HITACHI LTD,KOBUBU WORKS,HITACHI,IBARAKI 316,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.576178

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2784 / 2787

页数：4

共 10 条

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[8] BUCKET-TYPE ION-SOURCE FOR ION MILLING [J].

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