STRUCTURAL ORDER IN SI-N AND SI-N-O FILMS PREPARED BY PLASMA ASSISTED CHEMICAL VAPOR-DEPOSITION PROCESS

被引：41

作者：

BUDHANI, RC

PRAKASH, S

DOERR, HJ

BUNSHAH, RF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574538

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1644 / 1648

页数：5

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