FORMATION OF GDSI2 UNDER UHV EVAPORATION AND INSITU ANNEALING

被引：16

作者：

SUU, HV

PETO, G

MEZEY, G

PASZTI, F

KOTAI, E

FRIED, M

MANUABA, A

ZSOLDOS, E

GYULAI, J

机构：

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 06期

关键词：

D O I：

10.1063/1.96523

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：437 / 438

页数：2

共 6 条

[1] THE FORMATION OF SILICIDES FROM THIN-FILMS OF SOME RARE-EARTH-METALS [J].

BAGLIN, JE ;

HEURLE, FMD ;

PETERSSON, CS .

APPLIED PHYSICS LETTERS, 1980, 36 (07) :594-596

[2] DIFFUSION MARKER EXPERIMENTS WITH RARE-EARTH SILICIDES AND GERMANIDES - RELATIVE MOBILITIES OF THE 2 ATOM SPECIES [J].

BAGLIN, JEE ;

DHEURLE, FM ;

PETERSSON, CS .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) :2841-2846

[3] GROWTH-RATES FOR PT2SI AND PTSI FORMATION UNDER UHV AND CONTROLLED IMPURITY ATMOSPHERES [J].

CRIDER, CA ;

POATE, JM .

APPLIED PHYSICS LETTERS, 1980, 36 (06) :417-419

[4] TRANSITION-METAL SILICIDES [J].

MURARKA, SP .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1983, 13 :117-137

[5] ION-BEAM-INDUCED MODIFICATION OF SILICIDE FORMATION IN RARE-EARTH-METALS - ER-SI AND TB-SI SYSTEMS [J].

TSAUR, BY ;

HUNG, LS .

APPLIED PHYSICS LETTERS, 1980, 37 (10) :922-924

[6] LOW SCHOTTKY-BARRIER OF RARE-EARTH SILICIDE ON N-SI [J].

TU, KN ;

THOMPSON, RD ;

TSAUR, BY .

APPLIED PHYSICS LETTERS, 1981, 38 (08) :626-628

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