CHARACTERIZATION OF GAAS-LAYERS GROWN DIRECTLY ON SI SUBSTRATES BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引:23
作者
PEARTON, SJ [1 ]
VERNON, SM [1 ]
ABERNATHY, CR [1 ]
SHORT, KT [1 ]
CARUSO, R [1 ]
STAVOLA, M [1 ]
GIBSON, JM [1 ]
HAVEN, VE [1 ]
WHITE, AE [1 ]
JACOBSON, DC [1 ]
机构
[1] SPIRE CORP,BEDFORD,MA 01730
关键词
D O I
10.1063/1.339690
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:862 / 867
页数:6
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