DETERMINATION OF CRYSTALLOGRAPHIC ORIENTATIONS IN SILICON FILMS BY RAMAN-MICROPROBE POLARIZATION MEASUREMENTS

被引：69

作者：

MIZOGUCHI, K

NAKASHIMA, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 07期

关键词：

D O I：

10.1063/1.342787

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2583 / 2590

页数：8

共 20 条

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