ELLIPSOMETRIC EXAMINATION OF THE OXIDATION OF VACUUM-DEPOSITED BISMUTH-FILMS

被引：12

作者：

ATKINSON, R ^{[1
]}

CURRAN, E ^{[1
]}

机构：

[1] NATL ELECT ENGN RES INST,COUNCIL SCI & IND RES,PRETORIA 0001,SOUTH AFRICA

来源：

THIN SOLID FILMS | 1985年 / 128卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(85)90083-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：333 / 339

页数：7

共 11 条

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[2]

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[5]

CURRAN EC, 1982, THESIS QUEENS U BELF

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OLESZKIEWICZ, E .

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[7] AUTOMATIC ELLIPSOMETRY WITHOUT A PHASE PLATE [J].

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TAYLOR, PL .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1977, 10 (06) :635-641

[8] OPTICAL-PROPERTIES AND STOICHIOMETRY OF EVAPORATED BISMUTH OXIDE THIN-FILMS [J].

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MARTIN, RC .

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[9] CROSS-SECTIONAL STRUCTURE OF BI FILMS AND ITS PHENOMENOLOGICAL ANALYSIS [J].

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MORI, T .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (03) :1159-1164

[10] STRUCTURE OF THERMALLY OXIDIZED BISMUTH-FILMS [J].

SHARMA, SK ;

PANDEY, SL .

THIN SOLID FILMS, 1979, 62 (02) :209-214

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